Figure 1a,b shows the differences in device configuration and acoustic resonance principle between the XBAR and YBAR. In terms of device configuration, the XBAR consists of the piezoelectric film (most likely LiNbO 3) and interdigital electrodes (IDTs) on its top surface, while the YBAR has one more electrode at the bottom of the piezoelectric film than the XBAR. Similar to the XBAR, the YBAR was proposed in 2020, in which longitudinally-excited shear waves resonate in the LiNbO 3 film. It can achieve an electromechanical coupling coefficient of more than 25% while having a working frequency over 4 GHz, further realizing a high-quality filter with a bandwidth up to hundreds of MHz. ![]() One of the representative BARs is the so-called XBAR, in which laterally-excited standing shear waves are the main resonance mode, i.e., the antisymmetric modes, in the LiNbO 3 film. At present, they are developing in the direction of having, to some extent and at the same time, a higher frequency, higher quality factor (Q), larger electromechanical coupling coefficient, smaller volume, and lower temperature coefficient (TCF), etc.īulk acoustic resonators (BARs) based on single-crystal lithium niobate (LiNbO 3) films, thanks to their ability to simultaneously meet high working frequency, large electromechanical coupling coefficient, and high Q at the same time, have recently shown a high practical application value. ![]() With the advent of the new generation of mobile communication technology (5G) and the Internet of things (IOT), the demand for high-performance microwave acoustic resonators continues to increase. ![]() The core of these devices is the microwave acoustic resonator, which can further construct today’s mainstream microwave acoustic filters, duplexers, multiplexers, and various kinds of sensors. Microwave acoustic devices based on surface acoustic waves (SAW) and bulk acoustic waves (BAW) are of great value in the communication and sensing fields.
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